Tallenna
Nanolithography
Nanolithography contains updated reviews by major experts on the well established techniques -- electron beam lithography (EBL), X-ray lithography (XRL), ion beam lithography (IBL) -- as well as on emergent techniques, such as scanning tunnelling lithography (STL).
- Alaotsikko
- A Borderland between STM, EB, IB, and X-Ray Lithographies
- Toimittaja
- M. Gentili, Carlo Giovannella, Stefano Selci
- Painos
- Softcover reprint of hardcover 1st ed. 1994
- ISBN
- 9789048143887
- Kieli
- englanti
- Paino
- 310 grammaa
- Julkaisupäivä
- 5.12.2010
- Kustantaja
- Springer
- Sivumäärä
- 216
