
Microelectronic Test Structures for CMOS Technology
Microelectronic Test Structures for CMOS Technology and Products addresses the basic concepts of the design of test structures for incorporation within test-vehicles, scribe-lines, and CMOS products.
- Kirjailija
- Manjul Bhushan, Mark B. Ketchen
- ISBN
- 9781441993762
- Kieli
- englanti
- Paino
- 446 grammaa
- Julkaisupäivä
- 30.8.2011
- Kustantaja
- Springer-Verlag New York Inc.
- Sivumäärä
- 373