
Mechanics of Microelectronics
From a mechanical engineering point of view, Microelectronics and Microsystems are multi-scale in both geometric and time domains, multi-process, multi-functionality, multi-disciplinary, multi-material/interface, multi-damage and multi-failure mode.
- Kirjailija
- G.Q. Zhang, W.D. van Driel, X.J. Fan
- Painos
- 1st ed. Softcover of orig. ed. 2006
- ISBN
- 9789048172313
- Kieli
- englanti
- Paino
- 310 grammaa
- Julkaisupäivä
- 22.11.2010
- Kustantaja
- Springer
- Sivumäärä
- 566