
Mechanics of Microelectronics
From a mechanical engineering point of view, Microelectronics and Microsystems are multi-scale in both geometric and time domains, multi-process, multi-functionality, multi-disciplinary, multi-material/interface, multi-damage and multi-failure mode.
- Kirjailija
- G.Q. Zhang, W.D. van Driel, X.J. Fan
- Painos
- 2006 ed.
- ISBN
- 9781402049347
- Kieli
- englanti
- Paino
- 446 grammaa
- Julkaisupäivä
- 23.6.2006
- Kustantaja
- Springer-Verlag New York Inc.
- Sivumäärä
- 566