Tallenna
Epitaxy
Kirjailija:
nidottu, 2010
englanti
It covers and discusses in details the most important epitaxial growth techniques, which are currently widely used in basic research as well as in manufacturing processes of devices, namely solid-phase epitaxy, liquid-phase epitaxy, vapor-phase epitaxy, including metal-organic vapor-phase epitaxy and molecular-beam epitaxy.
- Alaotsikko
- Physical Principles and Technical Implementation
- Kirjailija
- Marian A. Herman, W. Richter, Helmut Sitter
- Painos
- Softcover reprint of hardcover 1st ed. 2004
- ISBN
- 9783642087370
- Kieli
- englanti
- Paino
- 310 grammaa
- Julkaisupäivä
- 1.12.2010
- Sivumäärä
- 525
