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Epitaxy
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Epitaxy

It covers and discusses in details the most important epitaxial growth techniques, which are currently widely used in basic research as well as in manufacturing processes of devices, namely solid-phase epitaxy, liquid-phase epitaxy, vapor-phase epitaxy, including metal-organic vapor-phase epitaxy and molecular-beam epitaxy.
Alaotsikko
Physical Principles and Technical Implementation
Painos
Softcover reprint of hardcover 1st ed. 2004
ISBN
9783642087370
Kieli
englanti
Paino
310 grammaa
Julkaisupäivä
1.12.2010
Sivumäärä
525