Tallenna
Dry Etching for VLSI
Kirjailija:
nidottu, 2013
englanti
This book has been written as part of a series of scientific books being published by Plenum Press. This book is unique in that it gives a compact, yet complete, in-depth overview of fundamentals, systems, processes, tools, and applications of etching with gas plasmas for VLSI.
- Kirjailija
- A.J. van Roosmalen, J.A.G. Baggerman, S.J.H. Brader
- Painos
- Softcover reprint of the original 1st ed. 1991
- ISBN
- 9781489925688
- Kieli
- englanti
- Paino
- 310 grammaa
- Julkaisupäivä
- 29.5.2013
- Kustantaja
- Springer-Verlag New York Inc.
- Sivumäärä
- 237
