Tallenna
Dry Etching for VLSI
Kirjailija:
sidottu, 1991
englanti
This book has been written as part of a series of scientific books being published by Plenum Press. This book is unique in that it gives a compact, yet complete, in-depth overview of fundamentals, systems, processes, tools, and applications of etching with gas plasmas for VLSI.
- Kirjailija
- A.J. van Roosmalen, J.A.G. Baggerman, S.J.H. Brader
- Painos
- 1991 ed.
- ISBN
- 9780306438356
- Kieli
- englanti
- Paino
- 446 grammaa
- Julkaisupäivä
- 31.3.1991
- Kustantaja
- Kluwer Academic/Plenum Publishers
- Sivumäärä
- 237
