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3-Dimensional Process Simulation
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3-Dimensional Process Simulation

Whereas two-dimensional semiconductor process simulation has achieved a certain degree of maturity, three-dimensional process simulation is a newly emerging field in which most efforts are dedicated to necessary basic developments.
Toimittaja
J. Lorenz
Painos
Softcover reprint of the original 1st ed. 1995
ISBN
9783709174302
Kieli
englanti
Paino
310 grammaa
Julkaisupäivä
6.10.2011
Sivumäärä
196