
Plasma-Surface Interactions and Processing of Materials
The subjects dealt with in the book include: the physics and chemistry of plasmas, plasma diagnostics, physical sputtering and chemical etching, plasma assisted deposition of thin films, ion and electron bombardment, and plasma processing of inorganic and polymeric materials.
- Upplaga
- Softcover reprint of the original 1st ed. 1990
- ISBN
- 9789401073691
- Språk
- Engelska
- Vikt
- 310 gram
- Utgivningsdatum
- 2011-10-01
- Förlag
- Springer
- Sidor
- 558
