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Plasma-Surface Interactions and Processing of Materials
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Plasma-Surface Interactions and Processing of Materials

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The subjects dealt with in the book include: the physics and chemistry of plasmas, plasma diagnostics, physical sputtering and chemical etching, plasma assisted deposition of thin films, ion and electron bombardment, and plasma processing of inorganic and polymeric materials.
Upplaga
Softcover reprint of the original 1st ed. 1990
ISBN
9789401073691
Språk
Engelska
Vikt
310 gram
Utgivningsdatum
2011-10-01
Förlag
Springer
Sidor
558