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Plasma-Surface Interactions and Processing of Materials
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Plasma-Surface Interactions and Processing of Materials

inbunden, 1990
Engelska
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The subjects dealt with in the book include: the physics and chemistry of plasmas, plasma diagnostics, physical sputtering and chemical etching, plasma assisted deposition of thin films, ion and electron bombardment, and plasma processing of inorganic and polymeric materials.
Upplaga
1990 ed.
ISBN
9780792305842
Språk
Engelska
Vikt
446 gram
Utgivningsdatum
1990-01-31
Förlag
Springer
Sidor
558