
Laser Heat-Mode Lithography
This book provides a systematic description and analysis of laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer, while also presenting typical experimental results and applications.
- Undertitel
- Principle and Methods
- Författare
- Jingsong Wei
- Upplaga
- 2019 ed.
- ISBN
- 9789811509421
- Språk
- Engelska
- Vikt
- 446 gram
- Utgivningsdatum
- 2019-11-29
- Sidor
- 208
