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Laser Heat-Mode Lithography
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Laser Heat-Mode Lithography

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This book provides a systematic description and analysis of laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer, while also presenting typical experimental results and applications.

Undertitel
Principle and Methods
Författare
Jingsong Wei
Upplaga
2019 ed.
ISBN
9789811509452
Språk
Engelska
Vikt
310 gram
Utgivningsdatum
2020-11-29
Sidor
208