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Plasma Charging Damage
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Plasma Charging Damage

Forfatter:
Engelsk
In the 50 years since the invention of transistor, silicon integrated circuit (IC) technology has made astonishing advances. In state of the art silicon Ie manufacturing process, plasma is used in more than 20 different critical steps.
Forfatter
Kin P. Cheung
Opplag
Softcover reprint of the original 1st ed. 2001
ISBN
9781447110620
Språk
Engelsk
Vekt
310 gram
Utgivelsesdato
30.8.2012
Antall sider
346