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Wafer Fabrication
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Wafer Fabrication

Forfatter:
Engelsk
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This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research combined with cases studies. Written in a practical way, it is an essential reference for researchers and engineers in manufacturing and management.
Undertittel
Automatic Material Handling System
Forfatter
Jie Zhang
ISBN
9783110487473
Språk
Engelsk
Utgivelsesdato
24.9.2018
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