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Ultra-Clean Technology Handbook
heftet, 2020
Engelsk
Evaluating the effectiveness of conventional wet processes for cleaning silicon wafers in semiconductor production, this reference reveals concrete measures to improve ultrapure water quality reviewing the structure and physical characteristics of ultrapure water molecules.
- Undertittel
- Volume 1: Ultra-Pure Water
- Redaktør
- Tadahiro Ohmi
- ISBN
- 9780367402341
- Språk
- Engelsk
- Vekt
- 1750 gram
- Utgivelsesdato
- 30.6.2020
- Forlag
- CRC Press
- Antall sider
- 944
