Spar
Toward Inertial-Navigation-on-Chip
This thesis develops next-generation multi-degree-of-freedom gyroscopes and inertial measurement units (IMU) using micro-electromechanical-systems (MEMS) technology. It covers both a comprehensive study of the physics of resonator gyroscopes and novel micro/nano-fabrication solutions to key performance limits in MEMS resonator gyroscopes.
- Undertittel
- The Physics and Performance Scaling of Multi-Degree-of-Freedom Resonant MEMS Gyroscopes
- Forfatter
- Haoran Wen
- Opplag
- 2019 ed.
- ISBN
- 9783030254728
- Språk
- Engelsk
- Vekt
- 310 gram
- Serie
- Springer Theses
- Utgivelsesdato
- 25.9.2020
- Antall sider
- 127
