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Subsecond Annealing of Advanced Materials
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Subsecond Annealing of Advanced Materials

The thermal processing of materials ranges from few fem to seconds by Swift Heavy Ion Implantation to about one second using advanced Rapid Thermal Annealing.
Undertittel
Annealing by Lasers, Flash Lamps and Swift Heavy Ions
Opplag
Softcover reprint of the original 1st ed. 2014
ISBN
9783319352879
Språk
Engelsk
Vekt
310 gram
Utgivelsesdato
23.8.2016
Antall sider
321