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Subsecond Annealing of Advanced Materials
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Subsecond Annealing of Advanced Materials

The thermal processing of materials ranges from few fem to seconds by Swift Heavy Ion Implantation to about one second using advanced Rapid Thermal Annealing.
Undertittel
Annealing by Lasers, Flash Lamps and Swift Heavy Ions
Opplag
2014 ed.
ISBN
9783319031309
Språk
Engelsk
Vekt
446 gram
Utgivelsesdato
30.12.2013
Antall sider
321