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Silicon Nitride for Microelectronic Applications
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Silicon Nitride for Microelectronic Applications

Forfatter:
Engelsk
2 References 4 Methods of Preparation • 5 Introduction • 5 Direct Nitridation Method 8 Evaporation Method • 9 Glow Discharge Method.
Undertittel
Part 1 Preparation and Properties
Forfatter
John T. Milek
Opplag
Softcover reprint of the original 1st ed. 1971
ISBN
9781468461640
Språk
Engelsk
Vekt
310 gram
Utgivelsesdato
21.1.2013
Antall sider
118