Spar
Silicon Nitride for Microelectronic Applications
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1 Diffusion Mask Applications . . . . . . . . . . . . '" 11 Glass-to-Metal Seals . 23 Passivation Applications . 24 Isolation . 76 Radiation Hardening Applications .
- Undertittel
- Part 2 Applications and Devices
- Forfatter
- J. T. Milek
- Opplag
- Softcover reprint of the original 1st ed. 1972
- ISBN
- 9781461596110
- Språk
- Engelsk
- Vekt
- 310 gram
- Utgivelsesdato
- 21.1.2013
- Antall sider
- 117
