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Silicon Carbide Microsystems for Harsh Environments
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Silicon Carbide Microsystems for Harsh Environments

innbundet, 2011
Engelsk
This book reviews state-of-the-art Silicon Carbide (SiC) technologies. It includes reviews of MEMS devices and provides a framework for the joining of electronics and MEMS along with packaging into usable harsh-environment-ready sensor modules.
Opplag
2011 ed.
ISBN
9781441971203
Språk
Engelsk
Vekt
446 gram
Utgivelsesdato
30.5.2011
Antall sider
232