Silicon Anodization as a Structuring Technique
Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime.
- Undertittel
- Literature Review, Modeling and Experiments
- Forfatter
- Alexey Ivanov
- Opplag
- 1st ed. 2018
- ISBN
- 9783658192372
- Språk
- Engelsk
- Vekt
- 310 gram
- Utgivelsesdato
- 22.9.2017
- Forlag
- Springer
- Antall sider
- 316
