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Semiconductor Lithography
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Semiconductor Lithography

In fabricating a semiconductor device such as a transistor, a series of hot processes consisting of vacuum film deposition, oxidations, and dopant implantation are all patterned into microscopic circuits by the wet processes of lithography.
Undertittel
Principles, Practices, and Materials
Opplag
Softcover reprint of the original 1st ed. 1988
ISBN
9781461282280
Språk
Engelsk
Vekt
310 gram
Utgivelsesdato
22.2.2012
Antall sider
952