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Reduced Thermal Processing for ULSI
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Reduced Thermal Processing for ULSI

As feature dimensions of integrated circuits shrink, the associated geometrical constraints on junction depth impose severe restrictions on the thermal budget for processing such devices.
Redaktør
R.A. Levy
Opplag
Softcover reprint of the original 1st ed. 1989
ISBN
9781461278573
Språk
Engelsk
Vekt
310 gram
Utgivelsesdato
30.9.2011
Antall sider
450