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Reactive Sputter Deposition
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Reactive Sputter Deposition

In the family of Physical Vapour Deposition techniques, sputtering is one of the most important. This book describes various aspects of the reactive magnetron sputtering process, from the discharge up to the resulting thin film growth allowing the reader to understand the complete process.
Opplag
2008 ed.
ISBN
9783540766629
Språk
Engelsk
Vekt
446 gram
Utgivelsesdato
24.4.2008
Antall sider
572