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Process Variations in Microsystems Manufacturing
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Process Variations in Microsystems Manufacturing

Forfatter:
innbundet, 2020
Engelsk
This book thoroughly examines and explains the basic processing steps used in MEMS fabrication (both integrated circuit and specialized micro machining processing steps.
Forfatter
Michael Huff
Opplag
2020 ed.
ISBN
9783030405588
Språk
Engelsk
Vekt
446 gram
Utgivelsesdato
10.4.2020
Antall sider
521