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Precursor Chemistry of Advanced Materials
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Precursor Chemistry of Advanced Materials

innbundet, 2005
Engelsk

Material synthesis by the transformation of organometallic compounds (precursors) by vapor deposition techniques such as chemical vapor deposition (CVD) and atomic layer deposition (ALD) has been in the forefront of modern day research and development of new materials.

Undertittel
CVD, ALD and Nanoparticles
Opplag
2005 ed.
ISBN
9783540016052
Språk
Engelsk
Vekt
446 gram
Utgivelsesdato
29.9.2005
Antall sider
214