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Poly-SiGe for MEMS-above-CMOS Sensors
Forfatter:
heftet, 2015
Engelsk
Poly-SiGe for MEMS-above-CMOS sensors demonstrates the compatibility of poly-SiGe with post-processing above the advanced CMOS technology nodes through the successful fabrication of an integrated poly-SiGe piezoresistive pressure sensor, directly fabricated above 0.13 ?m Cu-backend CMOS.
- Forfatter
- Pilar Gonzalez Ruiz, Kristin De Meyer, Ann Witvrouw
- Opplag
- Softcover reprint of the original 1st ed. 2014
- ISBN
- 9789401781404
- Språk
- Engelsk
- Vekt
- 310 gram
- Utgivelsesdato
- 8.8.2015
- Forlag
- Springer
- Antall sider
- 199
