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Poly-SiGe for MEMS-above-CMOS Sensors
Forfatter:
innbundet, 2013
Engelsk
Poly-SiGe for MEMS-above-CMOS sensors demonstrates the compatibility of poly-SiGe with post-processing above the advanced CMOS technology nodes through the successful fabrication of an integrated poly-SiGe piezoresistive pressure sensor, directly fabricated above 0.13 ?m Cu-backend CMOS.
- Forfatter
- Pilar Gonzalez Ruiz, Kristin De Meyer, Ann Witvrouw
- Opplag
- 2014 ed.
- ISBN
- 9789400767980
- Språk
- Engelsk
- Vekt
- 446 gram
- Utgivelsesdato
- 30.7.2013
- Forlag
- Springer
- Antall sider
- 199
