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Plasma-Surface Interactions and Processing of Materials
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Plasma-Surface Interactions and Processing of Materials


The subjects dealt with in the book include: the physics and chemistry of plasmas, plasma diagnostics, physical sputtering and chemical etching, plasma assisted deposition of thin films, ion and electron bombardment, and plasma processing of inorganic and polymeric materials.
Opplag
Softcover reprint of the original 1st ed. 1990
ISBN
9789401073691
Språk
Engelsk
Vekt
310 gram
Utgivelsesdato
1.10.2011
Forlag
Springer
Antall sider
558