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Plasma-Surface Interactions and Processing of Materials
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Plasma-Surface Interactions and Processing of Materials

innbundet, 1990
Engelsk

The subjects dealt with in the book include: the physics and chemistry of plasmas, plasma diagnostics, physical sputtering and chemical etching, plasma assisted deposition of thin films, ion and electron bombardment, and plasma processing of inorganic and polymeric materials.
Opplag
1990 ed.
ISBN
9780792305842
Språk
Engelsk
Vekt
446 gram
Utgivelsesdato
31.1.1990
Forlag
Springer
Antall sider
558