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Planar Waveguide Optical Sensors
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Planar Waveguide Optical Sensors

This book concentrates on the design and development of integrated optic waveguide sensors using silicon based materials. It gives the readers the full background in the field of sensors, reasons for using silicon oxynitride as a potential waveguide material as well as its fabrication processes and possible uses.
Undertittel
From Theory to Applications
Opplag
Softcover reprint of the original 1st ed. 2016
ISBN
9783319817347
Språk
Engelsk
Vekt
310 gram
Utgivelsesdato
22.4.2018
Antall sider
179