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Planar Processing Primer
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Planar Processing Primer

Forfatter:
Engelsk
Planar Processing Primer is based on lecture notes for a silicon planar process­ ing lecture/lab course offered at the University of Illinois-UC for over fifteen years. The text describes and explains, at an introductory level, the principal processing steps used to convert raw silicon into a semiconductor device or integrated circuit.
Forfatter
G. Anner
Opplag
Softcover reprint of the original 1st ed. 1990
ISBN
9789401066822
Språk
Engelsk
Vekt
310 gram
Utgivelsesdato
28.10.2011
Forlag
Springer
Antall sider
634