Novel Silicon Based Technologies
Eight contributions address: GaAs on Si, ion beam synthesis in silicon, ion beam processing of chemical vapor deposited silicon layers, technology and devices for silicon based three-dimensional circuits, integrated fabrication of micromechanical structures on silicon, micromachining of silicon for
- Undertittel
- Conference Proceedings
- Redaktør
- R. A. Levy
- ISBN
- 9780792311126
- Språk
- Engelsk
- Vekt
- 588 gram
- Utgivelsesdato
- 31.1.1991
- Antall sider
- 292
