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Novel Silicon Based Technologies
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Novel Silicon Based Technologies

innbundet, 1991
Engelsk

Eight contributions address: GaAs on Si, ion beam synthesis in silicon, ion beam processing of chemical vapor deposited silicon layers, technology and devices for silicon based three-dimensional circuits, integrated fabrication of micromechanical structures on silicon, micromachining of silicon for

Undertittel
Conference Proceedings
Redaktør
R. A. Levy
ISBN
9780792311126
Språk
Engelsk
Vekt
588 gram
Utgivelsesdato
31.1.1991
Antall sider
292