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Nanoimprint Lithography: An Enabling Process for Nanofabrication
Nanoimprint Lithography: An enabling process for nanofabrication presents a comprehensive description of nanotechnology that is one of the most promising low-cost, high-throughput technologies for manufacturing nanostructures, and an emerging lithography candidates for 22, 16 and 11 nm nodes.
- Forfatter
- Weimin Zhou
- Opplag
- Softcover Reprint of the Original 1st 2013 ed.
- ISBN
- 9783662510865
- Språk
- Engelsk
- Vekt
- 310 gram
- Utgivelsesdato
- 23.8.2016
- Antall sider
- 249
