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Microscopy of Semiconducting Materials
Microscopy of Semiconducting Materials
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Microscopy of Semiconducting Materials

Engelsk
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With IC technology continuing to advance, the analysis of very small structures remains critically important. Microscopy of Semiconducting Materials provides an overview of advances in semiconductor studies using microscopy. The book explores the use of transmission and scanning electron microscopy, ultrafine electron probes, and EELS to investigat
Undertittel
1999 Proceedings of the Institute of Physics Conference held 22-25 March 1999, University of Oxford, UK
ISBN
9781040076781
Språk
Engelsk
Utgivelsesdato
1.1.2000
Forlag
CRC PRESS
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