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Micro and Nano Fabrication
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For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
- Undertittel
- Tools and Processes
- Forfatter
- Hans H. Gatzen, Volker Saile, Jurg Leuthold
- ISBN
- 9783662443958
- Språk
- Engelsk
- Utgivelsesdato
- 2.1.2015
- Tilgjengelige elektroniske format
- PDF - Adobe DRM
- Les e-boka her
- E-bokleser i mobil/nettbrett
- Lesebrett
- Datamaskin
