
Mechanics of Microelectronics
From a mechanical engineering point of view, Microelectronics and Microsystems are multi-scale in both geometric and time domains, multi-process, multi-functionality, multi-disciplinary, multi-material/interface, multi-damage and multi-failure mode.
- Forfatter
- G.Q. Zhang, W.D. van Driel, X.J. Fan
- Opplag
- 1st ed. Softcover of orig. ed. 2006
- ISBN
- 9789048172313
- Språk
- Engelsk
- Vekt
- 310 gram
- Utgivelsesdato
- 22.11.2010
- Forlag
- Springer
- Antall sider
- 566
