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Measurement Technology for Micro-Nanometer Devices
Forfatter:
e-bok, 2016
Engelsk
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A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale Highlights the advanced research work from industry and academia in micro-nano devices test technology Written at both introductory and advanced levels, provides the fundamentals and theories Focuses on the measurement techniques for characterizing MEMS/NEMS devices
- Forfatter
- Liguo Chen, Dachao Li, Wendong Zhang, Jingdong Chen, Xiujian Chou, Tielin Shi, Zongmin Ma, Chenyang Xue, Haifei Bao
- ISBN
- 9781118717981
- Språk
- Engelsk
- Utgivelsesdato
- 18.10.2016
- Forlag
- WILEY
- Tilgjengelige elektroniske format
- PDF - Adobe DRM
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- Lesebrett
- Datamaskin
