
Materials Design, Fabrication, Packaging and Reliability of Nano and Micro–Electro–Mechanical Systems (N/MEMS)
- Forfatter
- Mustafa Yavuz, Arthur Willoughby, Peter Capper, Safa Kasap
- ISBN
- 9781119130796
- Språk
- Engelsk
- Vekt
- 446 gram
- Utgivelsesdato
- 10.6.2021
- Forlag
- Wiley-Blackwell
- Antall sider
- 424
