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Low Pressure Plasmas and Microstructuring Technology
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Low Pressure Plasmas and Microstructuring Technology

Forfatter:
innbundet, 2009
Engelsk
Over the last forty years, plasma supported processes have attracted ever - creasing interest, and now, all modern semiconductor devices undergo at least one plasma-involved processing step, starting from surface cleaning via coating to etching.
Forfatter
Gerhard Franz
Opplag
2009 ed.
ISBN
9783540858485
Språk
Engelsk
Vekt
446 gram
Utgivelsesdato
30.4.2009
Antall sider
732