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Low Dielectric Constant Materials for IC Applications
Low dielectric constant materials are an important component of microelectronic devices. Topics include: Organic dielectric materials, Inorganic dielectric materials, Composite dielectric materials, Metrology and characterization techniques, Integration, Reliability.
- Redaktør
- Paul S. Ho, Jihperng Leu, Wei William Lee
- Opplag
- Softcover reprint of the original 1st ed. 2003
- ISBN
- 9783642632211
- Språk
- Engelsk
- Vekt
- 310 gram
- Utgivelsesdato
- 4.10.2012
- Antall sider
- 310
