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Ion Implantation: Basics to Device Fabrication
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Ion Implantation: Basics to Device Fabrication

Ion implantation offers one of the best examples of a topic that starting from the basic research level has reached the high technology level within the framework of microelectronics.
Opplag
Softcover reprint of the original 1st ed. 1995
ISBN
9781461359524
Språk
Engelsk
Vekt
310 gram
Utgivelsesdato
23.2.2014
Antall sider
393