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Ion Implantation and Synthesis of Materials
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Ion Implantation and Synthesis of Materials

Ion implantation is one of the key processing steps in silicon integrated circuit technology. This book presents the physics and materials science of ion implantation and ion beam modification of materials.
Opplag
Softcover reprint of hardcover 1st ed. 2006
ISBN
9783642062599
Språk
Engelsk
Vekt
310 gram
Utgivelsesdato
12.2.2010
Antall sider
263