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Ion Implantation and Synthesis of Materials
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Ion Implantation and Synthesis of Materials

innbundet, 2006
Engelsk
Ion implantation is one of the key processing steps in silicon integrated circuit technology. This book presents the physics and materials science of ion implantation and ion beam modification of materials.
Opplag
2006 ed.
ISBN
9783540236740
Språk
Engelsk
Vekt
446 gram
Utgivelsesdato
9.8.2006
Antall sider
263