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Handbook of Advanced Plasma Processing Techniques
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Handbook of Advanced Plasma Processing Techniques

Engelsk
Since the microelectronics industry depends on having high process yields at each step of the fabrication process, it is imperative that a full understanding of plasma etching and deposition techniques be achieved.
Opplag
Softcover reprint of the original 1st ed. 2000
ISBN
9783642630965
Språk
Engelsk
Vekt
310 gram
Utgivelsesdato
1.11.2012
Antall sider
655