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Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets
This thesis describes the fabrication of metal-insulator-semiconductor (MIS) structures using very high permittivity dielectrics (based on rare earths) grown by high-pressure sputtering from metallic targets.
- Forfatter
- María Ángela Pampillón Arce
- Opplag
- Softcover reprint of the original 1st ed. 2017
- ISBN
- 9783319882840
- Språk
- Engelsk
- Vekt
- 310 gram
- Serie
- Springer Theses
- Utgivelsesdato
- 18.5.2018
- Antall sider
- 164
