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Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets
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Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets

innbundet, 2017
Engelsk

This thesis describes the fabrication of metal-insulator-semiconductor (MIS) structures using very high permittivity dielectrics (based on rare earths) grown by high-pressure sputtering from metallic targets.

Opplag
1st ed. 2017
ISBN
9783319666068
Språk
Engelsk
Vekt
446 gram
Utgivelsesdato
13.10.2017
Antall sider
164