Spar
Flash Lamp Annealing
Forfatter:
heftet, 2020
Engelsk
This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey.
- Undertittel
- From Basics to Applications
- Forfatter
- Lars Rebohle, Slawomir Prucnal, Denise Reichel
- Opplag
- 2019 ed.
- ISBN
- 9783030233013
- Språk
- Engelsk
- Vekt
- 310 gram
- Utgivelsesdato
- 14.8.2020
- Antall sider
- 288
