Spar
Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope
The design of gyrostructure, detection technology, orthogonal correction technology, the influence of temperature and the design of measurement and control system framework are introduced in detail, with illustrations for easy understanding.
It presents the principle, structure and related technology of silicon-based MEMS gyroscope.
- Forfatter
- Huiliang Cao
- Opplag
- 2023 ed.
- ISBN
- 9789811992469
- Språk
- Engelsk
- Vekt
- 446 gram
- Utgivelsesdato
- 18.4.2023
- Antall sider
- 224
